Vacuum Quality Differential Pump System + CTRL GP
This listing includes pumping system (retail $25,100) and the controller (retail $3,050).
-Granville-Phillips 835 VQM (Vacuum Quality Monitor) DPS (Differential Pump System) Part #835901-DPS-3M3-1
-Granville-Phillips 835 VQM (Vacuum Quality Monitor) Controller #835500-U1-1
The 835 VQM is a mass spectrometer that operates from UHV to 10-5 Torr and accurately measures the gases in the vacuum chamber. The 835 VQM Differential Pump System delivers the advantages of the 835 VQM at higher pressures. The VQM system c**ists of an autoresonant ion trap mass spectrometer gauge, a VQM Controller and VQM Viewer (NOT INCLUDED) software that that converts raw data into actionable information. The system is ratiometric, meaning that it determines the ratio of each gas to other gases in a vacuum chamber. It is usually coupled with a total pressure gauge to provide partial pressures of each gas as indication of the quality of the vacuum in the chamber.
The Differential Pump System by Granville-Phillips® extends the vacuum pressure range of the award-winning, high performance Vacuum Quality Monitor (VQM™) to address the needs of process monitoring and process control applicati** at pressures up to 3 Torr. All the benefits of the VQM, including speed and ease of use, can now be used to optimize PVD, ion implant, coating, and other vacuum processes to increase productivity, improve results, and save money.
TYPICAL USAGE:
Monitoring gas reacti**
Determining when to start a process
Detecting contaminants
Controlling the amount of reactive gas introduced
Leak detection
KEY FEATURES:
Operation from 3 Torr to 5x10-9 Torr
1-145 amu range or optionally 1-300 amu
Fast: 120 msec scan
Easy to setup including calibration
Quickly see gas composition and trend information
Includes turbo and roughing pumps
Technical Specs
Mass Range
1 - 300 amu
Operating Temperature
5 - 40°C (41 - 104°F), non - condensing
Dimensi**
43.52 cm high (17.13 inches)
Weight
10.88 kg (24 lbs) plus the weight of the gate valve
Pressure Range
3 Torr to 10-5 Torr through orifice, to 5x10-9 Torr through bypass gate valve
Type
VQM Differential Pumping System
Resolution
180 resolution for the 300 amu system
Resp**e Time
120 ms
Dynamic Range
2 decades for single scan, 3 or more with averaging
Mounting Flange
2.75 in. ConFlat
Exposed Materials
304L Stainless Steel, 316L Stainless Steel, Alumina Ceramic, Al2O3 98% Min., Nickel, Molybdenum, Ag/Cu eutectic braze, Gold, Iridium, Yttria, Y2O3 99.95%, Lead Glass (multiplier body), Chromium, Viton, Copper
New Retail Price through MKS $25,100 + $3,050 = $28,150
