Atlas
Atlas
Atlas
Atlas
Atlas™ from Edwards, provides outstanding reliability, excellent powder handling and corrosion resistance, delivering abatement performance for the semiconductor, flat panel display, solar and MOCVD industries.
Atlas abatement technology: a range of combustion gas abatement soluti** - specific to your process:
- Atlas TCS for common CVD gases (NF3/F2)
- Atlas TPU for PFC gases (ClF3, C2F6, C3F8) in CVD processes
- Atlas Kronis for the low-k CVD gases in next-generation processes
- Atlas Etch for semicon etch and flat panel display processes (CF4, SF6 and high flow PFCs)
- Atlas Helios for safe treatment of hydrogen processes in epitaxy and MOCVD
